Alignment mark, manufacturing method thereof, exposing method using the alignment mark, semiconductor device manufactured using the exposing method

ABSTRACT

An alignment mark formed on a surface of substrate for aligning with a mask through an irradiation of alignment light, which comprises a step formed with a concave portion and a convex portion and a metallic film deposited along the concave portion and the convex portion. A light absorption layer is formed over at least one of the concave portion and the convex portion reflecting the step, the light absorption layer lying over the concave portion having a different thickness from that of the light absorption layer lying over the convex portion when the light absorption layer is formed over both the concave portion and the convex portion, the light absorption layer comprising a material capable of absorbing at least a portion of wavelength region of the alignment light. The light absorption layer is desirably formed in a larger thickness on the convex portion of the step as compared with that on the concave portion. Desirably, the light absorption layer is a resist capable of absorbing a portion of wavelength region of the alignment light, or a resist containing a material capable of absorbing a portion of wavelength region of the alignment light.

This application is a Division of application Ser. No. 08/873,563 filedon Jun. 12, 1997 now U.S. Pat. No. 5,847,468, which is a Continuation ofSer. No. 08/536,266 filed on Sep. 29, 1995 which is abandoned.

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates to an alignment mark useful in the formation ofpattern using typically a lithography technique in the process ofmanufacturing a semiconductor device, in particular to an alignment markto be used in the formation or processing of a resist pattern and to themanufacturing method of the alignment mark.

Further, this invention relates to an exposing method using the abovementioned alignment mark and to a semiconductor device to bemanufactured using the exposing method.

2. Description of the Related Art

In the manufacture of semiconductor device, miniaturization of unitstructure (cell) constituting the device contributes to the saving ofmanufacturing cost of the device of high performance and large scale. Inan effort for realizing the miniaturization of cell, the partiesconcerned to the manufacture of semiconductor device are making anextensive effort on the technique and research of semiconductor device.

In order to realize the fine working of the device cell, it isimperative to improve working techniques such as an anisotropic etchingto the vertical direction. Additionally, a further development oftechnique with respect to fine resist-patterning such as an opticallithography is also demanded.

Regarding the formation of resist pattering, the resolution can beimproved by the following techniques. First, it is desired to select asan exposure light a ray of shorter wavelength such as g-line, i-line,extreme ultraviolet ray. It is also possible to improve the resolutionby using an improved irradiation method, such as a convertedirradiation. Now, owing to the development of a photomask which capableof controlling not only the distribution in intensity of transmittedlight but also the phase of light, the resolution of pattern is becomingmore improved.

Additionally, it is also required in order to achieve a fine patterninga mask pattern over a pattern preliminarily formed on the surface ofunderlying substrate with accuracy. Namely, a high accurate alignment isrequired. For the purpose of achieving this high accurate alignment,alignment systems of various type have been developed.

There are two typical alignment systems, i.e., a system wherein thealignment is individually performed to each exposure area which has beenformed in advance by dividing a substrate into several chips; and asystem wherein the alignment is performed all over the substrate atfirst, and exposure is performed on all exposure area. According to theformer system, each exposure area formed by dividing a substrate intoseveral chips is provided with alignment marks, so that the alignmentbetween a mask and a chip is performed by detecting the location of thealignment marks immediately before irradiating an exposure light to eachchip. Subsequently, an alignment light for transferring the mark patternto the substrate is sequentially moved to the exposure area of each chipthereby performing the exposure.

On the other hand, according to the latter system, the alignment mark isput on two or more locations of the substrate. In an operation ofaligning a mask with a substrate, a stage carrying substrate is moved toa mark-detecting position to sequentially detecting the alignment marks,and then on the basis of the extent of movement of the stage, thealignment between the mask and the substrate as a whole is performed.Subsequently, the exposure all over the exposure area of substrate isperformed.

In detecting the location of alignment mark, an optical detecting systeminstead of a needle-contacting system is generally employed.Accordingly, in this respect, the above mentioned two alignment exposuresystems belong to the same optical alignment system.

An optical alignment system generally employed is an image processingmethod, which can be performed as follows. Namely, in one method analignment light is first irradiated onto the regions of alignment markson a mask and substrate. Then, the intensity profile of reflected lightor transmitted light of the alignment light irradiated to the mask andsubstrate is measured with an area sensor. In another method, a maskalignment mark and a substrate alignment mark are first scanned withfocusing alignment light. Then, an intensity change of scattered lightof the alignment light scanning the mask mark and the substratealignment mark is measured with a detector. From this intensity profilethus obtained, a waveform corresponding to the mark per se or the stepof the mark is detected, and then the location of the mark is measuredon the basis of the waveform. After measuring the locations of mask markand the substrate (wafer) mark, the magnitude of relativemisregistration between these marks is determined on the basis of themeasured locations.

Recently, a new alignment method called "heterodyne method" usingdiffraction light of alignment light has been put into practical use.According to this heterodyne method, a mask and a substrate, each havinga diffraction grid pattern or checkerwise lattice pattern as analignment mark, are employed, and an alignment light is irradiated tothe mask and substrate to detect a diffraction light. Based on the phaseof this detected diffraction light, the magnitude of relativemisregistration between the mask and substrate is measured.

These optical alignment methods may be applied to a substrate with highreflectivity such as a substrate covered with a metallic film such asaluminum film, a substrate having a transparent material layer on ametallic film mentioned above, or a substrate having alignment marks ofa transparent material formed on a metallic film mentioned above. Thereis a problem however that when these optical alignment methods isapplied to a substrate with high reflectivity as mentioned above, thealignment accuracy becomes much lowered as compared with a substratewith low reflectivity such as a LOCOS substrate or a gate substrate.

Specifically, in the case of a substrate with high reflectivity having ametallic film on its top surface, the reflectance of convex portion orconcave portion constituting an alignment is almost the same as that inthe periphery thereof, and the reflection intensity is highly influencedby the surface roughness of metallic film. Accordingly, when an imageprocessing treatment is performed on a high reflectance substrate, onlya reflection intensity profile of large noise can be obtained, causing awaveform corresponding to the step of the mark to be buried within thenoise. Therefore, it is quite difficult to detect the waveformcorresponding to the step of the mark from the reflection intensityprofile, thus resulting in the lowering of alignment accuracy.

On the other hand, in the case of performing the positional detectionfrom the data on intensity or phase of diffracted light, the changes ofintensity or phase due to differences in the height of step or incross-sectional shape may be caused to increase, if the difference inreflectance between the convex portion and the concave portion is small,thus giving rise to the generation of random offset portion in themeasured value in each alignment mark.

Followings are explanations on the problem of lowering of alignmentaccuracy in a high reflectance substrate. As one example of usingheterodyne method for a high reflectance substrate, X-rays proximitylithography was employed. In the heterodyne alignment method usingX-rays proximity lighography, there is another problem in addition tothe problems mentioned above that a multiple reflection of alignmentlight to be generated between the substrate and mask tends to becomemore conspicuous when a high reflectance substrate is used, thus makingit one of reasons for the degradation of accuracy.

FIG. 1 illustrates a schematic view of an alignment system. FIG. 2 showsan incident light projected onto the marks of the mask and substrate;and a diffracted light from these marks.

In the alignment using the system shown in FIG. 1, HeNe laser beams 3aand 3b are projected onto the mask alignment mark 1 at same incidentangle in XZ plane. Additionally, HeNe laser beams 4a and 4b areprojected onto the substrate mark 2 at the same incident angle asmentioned above in XZ plane. Thereafter, the phase difference between adetecting light 5 diffracted at plus first order direction in YZ planeat the mask alignment mark and the detecting light 6 diffracted at plusfirst order direction in YZ plane at the substrate mark 2 is measured,and then the registration between the mask and the substrate isadjusted. Namely, an accurate measurement of a phase difference betweenthe light 5 detected from the mask mark and the light 6 detected fromthe alignment mark leads to the improvement of alignment accuracy.

However, according to this system, multiple reflection 14 and 14a willbe caused to generate between the mask 8 and the substrate 9 as shown inFIG. 2, so that disturbance light 11 and 12 will be generated. Thedisturbance light 11 is mingled with the light 5 detected from the maskmark and the disturbance light 12 is mingled with the light 6 detectedfrom the alignment mark. If such a disturbance light is mingled with thedetected light, the signal accuracy of alignment will be deteriorated.

The multiple reflection 14a can be vanished by providing a shade film 10to the mask, so the mingling of the disturbance light 11 with thedetected light 5 is prevented.

The influence of this disturbance light on the detected light 6 can beconfirmed by measuring the noise to be generated when only GAP (a spacebetween the mask and the substrate) is caused to change. Changing onlyof GAP can be effected for example by moving a substrate stage in Zdirection while preventing the mask and substrate stages from beingmoved in XY direction. FIG. 3 illustrates the generation of noise at acycle of λ/2 (λ: wavelength of HeNe laser) in an alignment signal whichoriginally should be indicating a constant value. When this amplitude inintensity of the detected light is converted to misregistration ofalignment, it corresponds to 0.1 μm or more of misregistration. Fromthis fact, it can be seen that if an disturbance light is mingled withthe detected light, it is no more possible to accurately measure theposition of the mark.

In an ordinary exposure method other than the X-ray proximitylighography, it can be generally said that a delicate non-uniformity inthe cross-sectional shape of alignment mark also tends to become a causefor the deterioration in alignment accuracy. This problem will bediscussed below.

In the case of a high reflectance substrate, the reflectance of convexportion of an alignment mark is almost the same as that of concaveportion because of its low transmittance. Additionally, the reflectanceof the side wall of the mark also is almost the same with those of theconvex and concave portions. Therefore, the phase of diffracted light ismuch influenced by the change in cross-sectional shape of the mark. Inthe heterodyne method where the detection of relative misregistrationbetween the mask and the substrate is performed according to the phase,any change in cross-sectional shape of mark may be a cause ofdeterioration in alignment accuracy.

As explained above, when an alignment method generally employed in theformation of pattern is applied to a high reflectance substrate having ametallic film such as aluminum film deposited thereon, only an alignmentof very poor accuracy is obtainable as compared with a low reflectancesubstrate according to the technical level of today. Therefore, in themanufacture of a semiconductor device using a metallic film such asaluminum film for the formation of metallic wiring, it is required forthe purpose of improving alignment accuracy to take countermeasures suchas thickening the wiring; increasing the number of wiring; or increasingthe manufacturing steps for forming the wiring.

The problems pertinent to a high reflectance substrate have beenexplained in the above description. However, it is also difficult toobtain an alignment signal of high signal to noise ratio (S/N) in thecase of performing an alignment between an underlying substrate of verylow reflectance and a mask. Therefore, it is also difficult to obtain analignment of satisfactory accuracy in this case.

In the occasion of applying an image processing treatment using areflected light to an underlying substrate of low reflectance, analignment light is first irradiated onto the substrate thereby obtaininga reflection intensity profile. Then, the location of mark is detectedfrom the minimum value of reflection intensity appearing near thevicinity of the step of the alignment mark, thereby performing thealignment of it with the mask. However, in the case of low reflectancesubstrate, the reflection intensity of the background is very low sothat its minimum value is caused to disappear, thereby making itdifficult to detect even the location of mark.

As explained above, when the image processing treatment is applied to ahigh reflectance underlying substrate, the S/N ratio of alignment iscaused to be much deteriorated as compared with other kinds ofunderlying substrate. In particular, in the case of the manufacturingprocess of semiconductor device, the formation of a metallic wiringwould be very difficult or complicated.

On the other hand, in the case of low reflectance underlying substrate,it is conceivable, for the purpose of improving alignment accuracy, toimprove the optical alignment system or the resolution of a detectingdevice. However, nothing have been successful to achieve such animprovement up to date.

SUMMARY OF THE INVENTION

Therefore, an object of this invention is to provide an alignment markand the manufacturing method thereof which is capable of increasing S/Nratio of alignment detecting signal and achieving a high accuracyalignment over a high reflectance underlying substrate.

Further object of this invention is to provide an exposure method usingthis alignment mark, and a semiconductor device to be manufactured usingthis exposure method.

Still another object of this invention is to provide an alignment markand the manufacturing method thereof, through use of the conventionalalignment apparatus, which is capable of increasing S/N ratio ofalignment detecting signal and achieving a high accuracy alignment overa low reflectance underlying substrate which is inherently poor inalignment accuracy.

Namely, according to the present invention, there is provided analignment mark for aligning with a mask through an irradiation ofalignment light, which comprises a step formed with a concave portionand a convex portion, the mark being formed on a surface of a substrate,and a metallic film deposited along the concave portion and the convexportion of the step, wherein a light absorption layer is formed over atleast one of the concave portion and the convex portion reflecting thestep, the light absorption layer lying over the concave portion having adifferent thickness from that of the light absorption layer lying overthe convex portion when the light absorption layer is formed over boththe concave portion and the convex portion, the light absorption layercomprising a material capable of absorbing at least a portion ofwavelength region of the alignment light.

This invention further provides an alignment mark for aligning with amask through an irradiation of alignment light, which comprises a stepformed with a concave portion and a convex portion, the mark beingformed on a surface of a substrate, wherein a light-reflecting layer isformed over at least one of the concave portion and the convex portion,the light-reflecting layer lying over the concave portion having adifferent thickness from that of the light-reflecting layer lying overthe convex portion when the light-reflecting layer is formed over boththe concave portion and the convex portion, the light-reflecting layerhaving a higher reflectance than that constituting the mark with respectto at least a portion of wavelength region of the alignment light.

The alignment mark according to this invention can be manufactured by amethod comprising the steps of;

preparing a substrate provided on its surface with an alignment mark foraligning with a mask through an irradiation of alignment light, the markcomprising a step formed with a concave portion and a convex portion,and with a metallic film deposited along the concave portion and theconvex portion of the step; and

forming a light absorption layer over at least one of the concaveportion and the convex portion reflecting the step, the light absorptionlayer lying over the concave portion having a different thickness fromthat of the light absorption layer lying over the convex portion whenthe light absorption layer is formed over both the concave portion andthe convex portion, the light absorption layer comprising a materialcapable of absorbing at least a portion of wavelength region of thealignment light.

Further, the alignment mark according to this invention can bemanufactured by a method comprising the steps of;

preparing a substrate provided on its surface with an alignment mark foraligning with a mask through an irradiation of alignment light, the markcomprising a step formed with a concave portion and a convex portion;and

forming a light reflective layer over at least one of the concaveportion and the convex portion reflecting the step, the light reflectivelayer lying over the concave portion having a different thickness fromthat of the light reflective layer lying over the convex portion whenthe light reflective layer is formed over both the concave portion andthe convex portion, the light reflective layer comprising a lightreflective material having a higher reflectance than a materialconstituting the mark to at least a portion of wavelength region of thealignment light.

According to this invention, there is further provided a light exposuremethod, which comprises the steps of;

preparing a substrate provided on its surface with an alignment markcomprising a step formed with a concave portion and a convex portion,with a metallic film deposited along the concave portion and the convexportion of the step, and with a resist film formed at least on themetallic film;

performing an alignment between the substrate and a mask by irradiatingan alignment light to the alignment mark of the substrate and to themark of mask from a light source for alignment after positioning themask having a prescribed pattern and mark above the substrate; and

transferring the pattern on the mask to the resist film deposited on thesubstrate, wherein the alignment is performed using reflected light,scattered light or diffracted light from at least a portion of thealignment mark, and reflected light, scattered light or diffracted lightfrom the mark of mask; and

the alignment mark of the substrate comprises a light absorption layerformed over at least one of the concave portion and the convex portionreflecting the step, the light absorption layer lying over the concaveportion having a different thickness from that of the light absorptionlayer lying over the convex portion when the light absorption layer isformed over both the concave portion and the convex portion, the lightabsorption layer comprising a material capable of absorbing at least aportion of wavelength region of the alignment light.

According to this invention, there is further provided a semiconductordevice, which comprises

an underlying substrate having a device region and an alignment markregion on its surface;

a metallic wiring formed on the device region of the substrate; and

an alignment mark formed on the alignment mark region of the substrate,wherein

the metallic wiring is formed by the steps of:

preparing a substrate provided on its surface with the alignment mark,with a metallic film deposited along a shape of the alignment mark, andwith a resist film formed at least on the metallic film;

positioning a mask having a prescribed device pattern and anotheralignment mark above the substrate by aligning the alignment mark of thesubstrate and the alignment mark of the mask;

transferring the device pattern on the resist film to form a resistpattern; and

etching the metallic film using the resist pattern as an etching mask,

the alignment being performed by first irradiating alignment light tothe alignment mark and to the mark of mask from a light source foralignment, and by making use of reflected light, scattered light ordiffracted light from at least a portion of the alignment mark, andreflected light, scattered light or diffracted light from the mark ofmask; and

the alignment mark of the substrate comprising a light absorption layerformed over at least one of the concave portion and the convex portionreflecting the step, the light absorption layer lying over the concaveportion having a different thickness from that of the light absorptionlayer lying over the convex portion when the light absorption layer isformed over both the concave portion and the convex portion,

the light absorption layer comprising a material capable of absorbing atleast a portion of wavelength region of the alignment light.

Additional objects and advantages of the invention will be set forth inthe description which follows, and in part will be obvious from thedescription, or may be learned by practice of the invention. The objectsand advantages of the invention may be realized and obtained by means ofthe instrumentalities and combinations particularly pointed out in theappended claims.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are incorporated in and constitute apart of the specification, illustrate presently preferred embodiments ofthe invention and, together with the general description given above andthe detailed description of the preferred embodiments given below, serveto explain the principles of the invention.

FIG. 1 is a perspective view schematically illustrating an alignmentsystem used in this invention as well as in the prior art;

FIG. 2 is a cross-sectional view schematically showing passages of lightthrough mask and substrate used in Example I-1 and in the prior art;

FIG. 3 is a graph showing detecting signals according to the prior art;

FIG. 4 is a sectional view of an alignment mark employed in Example I-1;

FIG. 5 is a graph showing signal intensity for explaining Example I-1;

FIG. 6 is a graph showing a result of analysis of the diffractionefficiency of Example I-1;

FIG. 7 is a graph showing a result of analysis of the diffractionefficiency of Comparative Example;

FIG. 8 is a graph showing a result of analysis of the phase differenceof Comparative Example;

FIG. 9 is a graph showing a result of analysis of the phase differenceof Example I-1;

FIGS. 10A and 10B shows respectively a sectional view illustrating themanufacturing method of alignment mark of Example I-2;

FIGS. 11A and 11B shows respectively a sectional view illustrating themanufacturing method of alignment mark of Example I-3;

FIGS. 12A and 12B shows respectively a sectional view illustrating themanufacturing method of alignment mark of Example I-4;

FIGS. 13A, 13B and 13C shows respectively a sectional view illustratingthe manufacturing method of alignment mark of Example I-5;

FIGS. 14A and 14B shows respectively a graph showing signals detected inExample I-1 and in the prior art;

FIG. 15 shows a schematic view illustrating the construction of FIBapparatus;

FIGS. 16A and 16B shows respectively a graph showing signals detected inExample I-6 and in the prior art;

FIG. 17 shows a schematic view illustrating the construction of IBSapparatus;

FIGS. 18A and 18B shows respectively a graph showing signals detected inExample 1-6 and in the prior art;

FIGS. 19A, 19B and 19C shows respectively a sectional view illustratingthe manufacturing method of alignment mark of Example II-1;

FIGS. 20A and 20B shows respectively a sectional view illustrating themanufacturing method of alignment mark of Example II-2;

FIGS. 21A and 21B shows respectively a reflection intensity profile ofan alignment signal;

FIGS. 22A to 22E shows respectively a sectional view illustrating themanufacturing method of alignment mark of Example II-3;

FIGS. 23A to 23D shows respectively a sectional view illustrating themanufacturing method of alignment mark of Example II-4; and

FIGS. 24A and 24B shows respectively a sectional view illustrating themanufacturing method of alignment mark of Example II-5.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

This invention will be further explained with reference to the followingpreferred embodiments.

When a substrate having a high reflectivity to an alignment light is tobe exposed to the alignment light, a layer of a material capable ofabsorbing at least a portion of wavelength region of the alignment lightis formed over at least one of the concave portion and convex portionconstituting an alignment mark formed on the substrate, the lightabsorption layer lying over the concave portion having a differentthickness from that of the light absorption layer lying over the convexportion when the light absorption layer is formed over both the concaveportion and the convex portion. With this construction, it is possibleto enhance the contrast of the alignment mark, thereby remarkablyimproving the accuracy of the alignment-detecting signal.

In particular, when this construction is applied to the transfer ofresist pattern in the formation of metallic wirings, any of theconventional measures such as thickening of wiring, increasing in numberof wiring or increasing in number of manufacturing steps may not berequired. Therefore, it is possible to decrease the number ofmanufacturing steps for the formation of wiring, and at the same time,to manufacture a semiconductor device extremely integrated and havinghigh reliability even if the minimum line width is the same as that ofthe conventional wiring.

On the other hand, when a substrate having a low reflectivity to analignment light is to be exposed to the alignment light, a layer of amaterial having a higher reflectance to the alignment light is formedover at least one of the concave portion and convex portion constitutingan alignment mark formed on the substrate, the light-reflecting layerlying over the concave portion having a different thickness from that ofthe light-reflecting layer lying over the convex portion when thelight-reflecting layer is formed over both the concave portion and theconvex portion, thereby increasing the reflectance ratio of the markportion.

When a high-reflectivity material is disposed on any of the concaveportion and convex portion constituting an alignment mark, thereflectance of a portion disposed with this high-reflectivity materialcan be selectively increased. When a high-reflectivity material isdisposed all over the alignment mark region, the reflectance ratiobetween the concave portion and the convex portion can be increased bysmoothly depositing a material capable of absorbing an alignment lighton this high-reflectivity material.

Therefore, it is possible to increase the reflectance ratio of theregion disposed with this high-reflectivity material, to intensifyalignment signals to be detected, and to remarkably improve the S/Nratio.

Namely, it is now possible according to this invention to improve theS/N ratio of alignment signals and to enhance the alignment accuracyirrespective of a substrate to be employed, i.e., even ahigh-reflectivity substrate or a very low-reflectivity substrate.

This invention will be further described in detail as follows.

An alignment mark according to this invention for improving an alignmentaccuracy in the use of a substrate having a high reflectivity to analignment light is constructed such that a layer of a material capableof absorbing at least a portion of wavelength region of the alignmentlight is formed over at least one of the concave portion and convexportion constituting a step of an alignment mark, the light absorptionlayer lying over the concave portion having a different thickness fromthat of the light absorption layer lying over the convex portion whenthe light absorption layer is formed over both the concave portion andthe convex portion. When it is desired to dispose a large amount of thelight-absorbing material on the concave portion rather than the convexportion of the step, it is possible to use as this material a resistcontaining therein an absorbent capable of absorbing a light of specificwavelength, or a resist inherently having a characteristic of absorbinga light of specific wavelength.

For such an absorbent, any desired absorbent may be employed dependingon the kind of alignment light. For example, anthraquinone-baseddyestuff, or disazo-based dyestuff may be employed. As for the resistinherently absorbing a light of specific wavelength, a resist for i-linecontaining a novolak resin and naphthoquinone-based compound may beemployed.

When a dyestuff is to be incorporated into a resist, the dyestuff may bepreferably added at a ratio of 0.1 to 5.0% by weight to the resist. Ifthe ratio is less than 0.1% by weight, it would be difficult to expect asufficient absorbing effect. On the other hand, if the ratio exceedsover 5.0% by weight, precipitation of the dyestuff or the deteriorationin shape of the resist being transferred would be caused.

As examples of anthraquinone-based dyestuff, the compounds representedby the following general formula (I) may be employed. ##STR1## whereinR¹ is hydrogen atom, hydroxyl group or a halogen atom; R² and R³ may bethe same or different and are individually hydrogen or a functionalgroup selected from the group shown below; and R⁴ is hydrogen orhydroxyl group; ##STR2##

This anthraquinone-based dyestuff has an absorption wavelength in thevicinity of 640 nm, so that it is very effective as an absorbent to thelight of 600-650 nm in wavelength, such as HeNe laser beam. Moreover,since the melting point of this anthraquinone-based dyestuff is 215 to217° C., this dyestuff is stable even in heat treatments to be conductedbefore or after the light exposure.

As an example of a resist containing a novolak resin andnaphthoquinone-based compound, an ordinary resist for i-line may beused. For example, TSCR-97 (Tokyo Ouka Co. Ltd.) may be employed. Sincethe resist for i-line mentioned above has an absorption region in thewavelength region of 400-500 nm, it is very effective as an absorbent tothe light of 400-500 nm in wavelength, such as HeCd laser beam.

As for disazo-based dyestuff, the compounds represented by the followinggeneral formula (II) may be employed. ##STR3## wherein X is asubstituent group selected from the group "a" mentioned below; Y is asubstituent group selected from the group "b" mentioned below. ##STR4##

This disazo-based dyestuff has an absorption region in the vicinity of510 nm, so that it is very effective as an absorbent to the light of500-550 nm in wavelength, such as Ar laser beam. Moreover, since themelting point of this disazo-based dyestuff is 184 to 185°C., thisdyestuff is stable even in heat treatments to be conducted before orafter the light exposure.

As for a resist to be used with an anthraquinone-based dyestuff ordisazo-based dyestuff contained therein, a resist which isphotosensitive to i-line, deep UV or radioactive rays may be used.

The deposition of a high-absorbing material mentioned above on at leastconcave portion may be performed as follows.

First, a high-absorbing material is deposited all over the alignmentmark, and then the light-absorbing material is removed until the surfaceof the convex portion of the mark is exposed, thereby disposing thelight-absorbing material on the concave portion. By the way, there is noneed to completely remove the light-absorbing material from the uppersurface of the convex portion of mark, but part of the light-absorbingmaterial may be left thereon, provided it is capable of detecting asignal intensity from the convex portion. Specifically, when the linearabsorption coefficient of the light-absorbing material is about 3 μm⁻¹,the signal intensity can be detected from the convex portion of the markeven if the convex portion is covered with 0.7 μm in thickness of thelight-absorbing material.

When the light-absorbing material coated on the mark is to be partiallyremoved so as to leave the light-absorbing material deposited on aprescribed region of the convex and concave portions, it is not requiredto perform the removing treatment in a manner to make flat the resultantsurface. As mentioned above, the purpose of this invention is toincrease the difference in reflectance between the concave portion andthe convex portion of the alignment mark. Namely, if the light-absorbingmaterial is disposed only on the concave portion of the mark, theabsorbency of this concave portion becomes large thereby attaining theobject of the invention. Therefore, there is no need in view ofachieving the purpose of this invention to flatten the surface to beobtained.

The deposition of the light-absorbing material can be performed by aspin coating method or a sputtering. The removal of the light-absorbingmaterial thus deposited can be performed by an etching treatment or byan abrasion treatment.

The removal of the light-absorbing material may be performed bypreliminarily depositing an etching-assistant on the layer of thelight-absorbing material before removing the light-absorbing materialdeposited all over the alignment mark, and then by etching thelight-absorbing material.

After depositing the light-absorbing material all over the alignmentmark, a specific kind of ultraviolet rays may be irradiated onto thelight-absorbing material to such a depth as to reach the surface of theconvex portion of the mark thereby performing a clarifying treatment,thus lowering the absorbency to the alignment light. There issubstantially no restriction as to the light-absorbing material to bedeposited, and thickness of the light-absorbing material may be suitablyselected depending on the intensity of ultra-violet rays to be employed.

It is also possible to employ as a light-absorbing material a materialwhich can be softened at a specific temperature. In this case, thissoftening material is coated all over the alignment mark region, andthen this coated softening material is subjected to heat treatmentthereby allowing the material coated on the surface of the convexportion to flow into the concave portion thereby disposing the softeningmaterial on the concave portion of the mark. As an example of thesoftening material, a resin such as a carbon resin may be used.

In the above explanation, an example where a light-absorbing material isdeposited at least on the concave portion of the step of the alignmentmark is explained. However, when it is desired to dispose a largeramount of the light-absorbing material on the concave portion ratherthan the convex portion of the step, the following method may beemployed. For example, after coating a light-absorbing material all overthe step, the light-absorbing material disposed over the convex portionof the step is selectively removed using an etching method or a abrasionmethod. In this case, a clarifying treatment may be conducted to thesurface of the alignment mark. Alternatively, the light-absorbingmaterial disposed all over the step may be softened so as to cause thelight-absorbing material disposed on the convex portion to flow into theconcave portion. It is also possible to increase the absorbency of theconcave portion to the alignment light by performing an opacifyingtreatment to a transparent material which has been preliminarilydisposed on the concave portion in a larger amount than on the convexportion of the step.

This opacification may be conducted by performing a treatment such as ahard bake to a transparent material such as a resist which has beendisposed on the concave portion in a larger amount than on the convexportion of the step.

Through such treatments as explained above, it is possible to leave alarger amount of light-absorbing material on the concave portion in thestep of the alignment mark.

The deposition of a larger amount of light-absorbing material on eitherthe concave portion or the convex portion of the alignment mark than theother can be performed using a converging light or a converging chargedparticle beam. For example, FIB (Focused Ion Beam) Deposition or IBS(Ion Beam Sputter) Deposition may be used for forming a carbon film.

This method will be explained in more detail as follows. First, analignment mark is covered with a mask plate having an opening. Then, amaterial capable of absorbing a light of a portion of the wavelengthregion of alignment light is scattered down to the mask plate at aprescribed angle thereby forming a carbon film on a prescribed portionof the mark region. Alternatively, an alignment mark region is firstcovered with a mask. Then, charged particle beam is irradiated to themask region at a prescribed angle in a prescribed gas atmosphere therebyforming a carbon film on a prescribed portion of the mark region.

The alignment mark having a light-absorbing layer prepared in thismanner is capable of improving an alignment accuracy in a resist patterntransferring using a resist for extreme ultraviolet.

The alignment mark of this invention can be employed in an exposureprocess wherein an alignment is performed by using a reflected light,scattered light or diffracted light of alignment light irradiated from alight source to a mark.

The exposure process of this invention can be applied to the manufactureof all kinds of semiconductor device wherein a metallic wiring is formedin accordance with the following steps. Namely, the steps ofmanufacturing a metallic wiring comprises; a step of forming a metalfilm all over an underlying substrate having an alignment markconstituted by a step comprising a concave portion and convex portion,thus obtaining the metal film reflecting the rugged features of thestep; a step of forming a resist film over the underlying substratecovered with the metal film; a step of disposing a mask having aprescribe pattern over the underlying substrate in alignment with theunderlying substrate; a step of forming a resist pattern by transferringthe pattern of the mask to the resist film; and a step of etching themetal film using the resist pattern being used as a mask, therebyobtaining a metallic wiring.

This invention can be effectively utilized for performing an accuratealignment between a mask and a substrate in the formation of a metallicwiring.

In the followings, an alignment for improving the alignment accuracy inthe employment of a low reflectance substrate will be explained indetail.

In order to improve the alignment accuracy in the employment of a lowreflectance substrate, a material having a high reflectance is disposedin a prescribed region of the step of the alignment mark formed inadvance on a substrate to be exposed. As for the material having a highreflectance, any desired material would be used as far as the materialhas a high Fresnel's reflectance and exhibits a large absorbency to analignment light. For example, aluminum or tungsten can be used.

According to this invention, it is preferable to make the reflectanceratio between the concave portion and the convex portion of the mark onthe substrate to become twice or more by disposing an aforementionedhigh reflectance material on a prescribed region of the concave portionor the convex portion of the mark on the substrate. The higher thereflectance ratio is, the larger is the S/N ratio of the alignmentsignal to be obtained. In the image-processing method or heterodynemethod, the S/N ratio of the alignment signal increases in proportion tothe reflectance ratio.

In the alignment exposure method using the alignment mark of thisinvention, a substrate having a high-reflective material disposed on (1)only the concave portion of the mark on the substrate; (2) only theconvex portion of the mark on the substrate; or (3) both of the concaveand convex portions of the mark on the substrate may be used.

The deposition of a high-reflective material on only the concave portionmay be performed as follows.

First, a high-reflective material is deposited all over the step, andthen the high-reflective material disposed over the convex portion isremoved through an etching or abrasion. Alternatively, thehigh-reflective material disposed all over the step may be softened soas to allowing the high-reflective material to flow into the concaveportion.

To be more specific, the deposition of a high-absorbing material may beperformed as follows.

First, a high-reflective material is deposited all over the concave andconvex portions in the region of alignment mark, and then thehigh-reflective material is removed until the surface of the convexportion of the mark is exposed, thereby disposing the high-reflectivematerial on the concave portion.

The deposition of the high-reflective material can be performed by asputtering method, a CVD method or an electron beam vapor depositionmethod. The thickness of the high-reflective material layer may besuitably selected so as to exceed the level of the surface of the convexportion of the alignment mark on the substrate. However, in view ofremoving the high-reflective material layer on the convex portion of themark in a subsequent step, the thickness of the high-reflective materiallayer may preferably be 1.2 to 2.0 times as large as the depth formed bythe concave and convex portions of the mark.

The removal of the high-reflective mater al thus deposited can beperformed by an etching or by a grinding.

As the concave portion of the alignment mark on the substrate is buriedwith a high-reflective material, the reflectance only of the concaveportion is increased, thus causing the reflectance ratio between theconcave portion and convex portion to increase. Namely, in the case ofthe image processing method, the S/N ratio of the alignment signal isincreased through an increase in reflectance ratio as mentioned above;whereas in the case of the heterodyne method, the S/N ratio of thealignment signal is increased through an increase in diffractionefficiency.

The method mentioned above is particularly effective for a substratewhere deterioration or non-uniformity of the sectional shape of theconcave portion of the alignment mark is more greater than that of theconvex portion. Namely, by covering a highly deformed concave portionwith a high-reflective material, a noise in the alignment signal can beinhibited to a great extent.

It is possible in the process mentioned above to flatly deposit ato-be-etched film comprising a prescribed material as anetching-adjusting material on the substrate after the deposition of thehigh-reflective material on the substrate and before the removal of thishigh-reflective material. Any material may be employed as thisto-be-etched film as long as the material has almost the same etchingrate as that of high-reflective material. An example of such ato-be-etched film is a resist film. This to-be-etched film may be formedon the layer of high-reflective material by means of spin coating to athickness of about 0.3 to 0.7 μm.

With this structure having the to-be-etched film being formed on thehigh-reflective material deposited on a substrate, it is possible toleave the high-reflective material on only the concave portion of thealignment mark by removing the to-be-etched film together with thehigh-reflective material deposited on the convex portion of thealignment mark. The removal of the to-be-etched film may be conducted bymeans of RIE (Reactive Ion Etching) using a predetermined gas.

The use of the to-be-etched film overlying the high-reflective materialis also effective in enlarging the selectivity of the material usefulfor the high- reflective material.

Alternatively, it is also possible to dispose the high-reflectivematerial on the concave portion of the alignment mark on a substrate.First, the high-reflective material is deposited all over the alignmentmark to a thickness less than 1/2 of the height of the step. Then, thehigh-reflective material thus deposited on the convex portion of themark is softened thereby allowing the high-reflective material to flowinto the concave portion. When aluminum is employed as thehigh-reflective material, the high-reflective material can be caused toflow into the concave portion by heating it at a temperature of about500° C.

On the other hand, if the high-reflective material is to be depositedonly on the convex portion of the alignment mark on the substrate to beexposed, the following method can be employed. According to this method,a film consisting of a soluble material is selectively deposited only onthe concave portion of the step, and then a light-reflective material isdeposited all over the concave and convex portion of the mark. Then, thesoluble material deposited on the concave portion is allowed todissolve, and at the same time, the light-reflective material depositedon this concave portion is removed thereby leaving the light-reflectivematerial only on the convex portion of the alignment mark.

This method is explained more detail as follows.

First of all, a soluble material is deposited all over the concave andconvex portions of the alignment mark region, and then this solublematerial is selectively removed thereby leaving a prescribed thicknessof the soluble material remained only on the concave portion. In thiscase, it is required to completely remove the soluble material from thesurface of the convex portion, and it is desirable that the height of astep to be formed between the surface of the soluble material remainedon the concave portion and the surface of the convex portion is higherthan the film thickness of a high-reflective material to be deposited ina subsequent step. The term of "soluble material" is defined to mean amaterial which can be dissolved without giving any bad influence to thesubstrate to be exposed as well as to the high-reflective material to bedeposited on the substrate.

Then, a light-reflective material is deposited uniformly all over theconvex portion of the mark and concave portion having the solublematerial deposited thereon. Subsequently, the soluble material depositedon the concave portion is allowed to dissolve, thereby removing thelight-reflective material depositing on the concave portion of the mark.As a result, the light-reflective material can be disposed only on theconvex portion of the alignment mark.

It is preferable to use a resist as a soluble material, because a flatcoated layer will be obtained by using the resist, and at the same time,it is possible to leave a prescribed thickness of the resist only on theconcave cortion of the mark by subjecting the resist layer to an oxygenplasma etching. Moreover, the resist can be easily removed by using anorganic solvent.

The method mentioned above is particularly effective for a substratewhere the shape of the convex portion of the alignment mark is moredeformed than that of the concave portion from an ideal shape, since theconvex portion can be covered with a high-reflective material.

A method of increasing the reflectance ratio between the concave portionand the convex portion by depositing a high-reflective material all overthe alignment mark on a substrate to be exposed will be explained asfollows.

First, a high-reflective material is deposited all over the alignmentmarks on a substrate to be exposed by means of sputtering, therebyincreasing the reflectance of the mark as a whole. In this occasion, thefilm thickness of the high-reflective material should preferably be at alevel that the reflectivity is increased and sectional shapes are keptat the concave portion and the convex portion. For example, whenaluminum is used as a high-reflective material, the film thickness ofabout 0.1 g m would be sufficient.

Subsequently, a light absorbent which is capable of absorbing analignment light is deposited on the alignment mark in such a manner thatthe surface of the convex portion is completely covered with the lightabsorbent and that a flat coated surface will be resulted. As for thematerial for the light absorbent, a dyestuff which would not deterioratethe sensitivity and resolution of the resist can be employed. The amountof the light absorbent may be suitably selected.

When the alignment light is irradiated to the alignment mark thusprepared, the intensity of reflected light from the concave portion ofthe mark would be more weakened than that from the convex portion, sincethe light from the concave portion of the mark is required to go backand forth an extra distance of the step between the concave portion andthe convex portion. Accordingly, it is possible to increase thereflectance ratio between the concave portion and the convex portion.

EXAMPLE

This invention will be further explained with reference to the followingexamples.

Example I

Example 1 describes an example of improving the accuracy of detectingthe alignment mark formed on an underlying substrate of highreflectance.

Example I-1

With the use of X-ray proximity lithography, the alignment accuracy canbe improved by disposing a resist containing a dyestuff at least on theconcave portion of the alignment mark. The alignment system for use inthe X-ray proximity lithography is illustrated in FIG. 1.

In the alignment using this system, HeNe laser beams 3a and 3b areirradiated to a mask alignment mark 1 in the XZ plane and at anequi-incident angle by means of an Acoustic Optical Modulator (AOM).Further, HeNe laser beams 4a and 4b are irradiated to a substrate mark 2in the XZ plane and at the same equi-incident angle as described above.These HeNe laser beams 3 and 4 used are modulated in advance to 79.9 MHzand 80.0 MHz respectively. On the mask is formed a membrane window 7 forallowing the incidence of HeNe laser beam 4 to pass through to thesubstrate mark 2. The HeNe laser beams 3a and 3b projected to the maskalignment mark 1 are given a primary diffraction in the direction of +Yin YZ plane to obtain a detecting light 5. On the other hand, the HeNelaser beams 4a and 4b projected to the wafer alignment mark 2 are givena primary diffraction in the direction of +y in YZ plane to obtain adetecting light 6. Then, a phase difference between the detecting light5 and the detecting light 6 is measured to perform the alignment betweenthe mask and the wafer (substrate).

As explained above, in the alignment using this system, a disturbancelight generated from the multiple reflection between the substrate andthe mask is mingled into she detecting light from the alignment marks ofthe mask and substrate as shown in FIG. 2, thereby giving rise to thecause of deterioration of alignment accuracy. In order to eliminate thisdisturbance light, an alignment mark is devised, which will be explainedwith reference to the drawings.

FIG. 4 exhibits the cross-sectional view of an alignment mark accordingto this example.

In the alignment mark shown in FIG. 4, an alignment mark 16 formed ofsilicon oxide is formed on a substrate 15, forming a step 0.95 μm inheight. On the concave portion and convex portion constituting the stepis formed a 0.4 μm thick metallic film 17 made for example of aluminum.On this metallic film 17 is deposited a resist layer 18 containing adyestuff having a linear absorption coefficient (k) of 2.7 μm⁻¹ to thealignment light. This dyestuff-containing resist layer 18 contains 2.0%in concentration of anthraquinone-based organic dyestuff having anabsorption wavelength in the vicinity of 633 nm, or the wavelength ofHeNe laser to be used as an alignment light.

The alignment light 19 projected to the substrate having on its surfacethe resist layer as mentioned above is reflected by the surface of theresist, thereby divided into the partial-lights, i.e., a partial-light20 reflected by the surface of the dyestuff-containing resist layer 18,and a couple of partial-light 21 and 22 whose intensities are firstattenuated in the dyestuff-containing resist layer 18 and then reflectedby the interface of the aluminum film 17 to be again attenuated in thedyestuff-containing resist layer 18. Since a light-path of thepartial-light 21 is longer than that of the partial-light 22 by theproportion of twice the height (h) of the step (h×2), the partial-light21 is absorbed in the resist film. As a result, a contrast of alignmentmark is increased. Accordingly, the contrast of the alignment mark canbe controlled by adjusting the linear absorption coefficient (k) of thedyestuff-containing resist 18 and the step (h).

An aluminum substrate provided with an alignment mark of increasedcontrast prepared as mentioned above was subjected to a measurement withrespect to a detecting light intensity while changing the distance ofspace between the mask and the substrate, the results being shown inFIG. 5 shows. The exposure apparatus used in this measurement wasdesigned to measure an exposure area of 15 nm squares in which threealignment systems (X, Y1 and Y2) were mounted. As shown in FIG. 5, theamplitude of a noise component 23 is very small, and an error in thealignment accuracy due to this noise component 23 can be controlled,when converted into positional distance, to ±0.01 μm or less. Namely, itcan be seen that, by uniformly forming a metallic film on the alignmentmark of a low reflectance substrate, and by further forming adyestuff-containing resist layer on the metallic film, it is possible toachieve substantially an accurate alignment of the substrate mark.

The above results were obtained by measuring the alignment mark of achip located at the center of substrate. However, it has been confirmedthat almost the same result indicating a decrease in amplitude of anoise component can be obtained for a chip located at the periphery ofthe substrate, thus indicating a decrease in non-uniformity of themeasured values obtained from all alignment marks of the wafer.

The reasons for these results may be explained as follows.

First, the diffraction efficiency of the alignment light to thesecondary diffraction order (X, Y) as the alignment light is projectedfrom the +X direction in XZ plane onto the alignment mark 2 on thesubstrate is defined as g_(x),y. This order of diffraction light wasdefined such that the order of diffraction light diffracting at a largeroutgoing angle than that of normal reflection was defined as plus, andthe order of diffraction light diffracting in the right side to incidentplane was defined also as plus. For example, when an alignment light 4bis diffracted go a diffraction order of (-1, 1) at an alignment mark,the diffraction efficiency thereof was represented by g₋₁,1. On theother hand, in order to allow the other alignment light 4a to bediffracted in the same direction as the detecting light 6, thediffraction order in this case can be expressed as (-1,-1). In thiscase, the diffraction efficiency can be expressed as g₋₁,-1.

Assuming that the reflectivity r_(m) and the transmitivity t_(m) ofX-rays at the membrane window of the mask are independent of an incidentangle, the alignment lights 4a and 4b projected from two directions arereflected multiply and diffracted respectively between the membranewindow 7 and the substrate mark 2, then reflected lights and diffractedlights are directed various directions. The electric vectors E₊ and E₋of the light thus reaching the detector among the reflected lights anddiffracted lights can be represented by the following equation (1). Inthis equation (1), the coefficient dependent on time can be ignored.##EQU1## wherein E_(i+) and E_(i-) are respectively an electric vector,δ=4πd/λ, d is a distance (GAP) between the mask and the substrate, and λis a wavelength of the alignment light.

If the amplitude of the first term and the amplitude of the second termin the equation (1) are respectively represented by E_(d)± and E_(o)±and defined by the following equations (2) and (3), the electric vectorsE₊ and E₋ can be represented by the equation (4). ##EQU2##

Σ in the equation (3) represents the sum total of all of differentg_(i),j ×g_(k),l which meets the conditions of (i+j=-1; i+l=1) or(i+k=-1; j+k=-1). The first term in the equation (4) corresponds to thedetecting light 6, and other terms excluding the first term are the sumtotal of disturbance light 12. If E_(d) and E_(o) are defined by thefollowing equations (5) and (6), the intensity of light "I" reaching thedetector can be represented by the following equation (7).

    E.sub.d =E.sub.d+ +E.sub.d-                                Equation (5)

    E.sub.o =E.sub.o+ +E.sub.o-                                Equation (6)

    I=|E.sub.+ +E.sub.- |.sup.2 =|E.sub.d |.sup.2 +|E.sub.o |.sup.2 +|E.sub.d E.sub.o |cos(δ+Δ)+                   Equation (7)

In this case, the intensity of light "I" reaching the detector can berepresented by the direct current components indicated by the first andsecond term in the equation (7), and the alternating current componentindicated by the third term (a cyclical noise) in the equation (7) inelectrical explain. It is considered that the disturbance light 12mentioned above may be the cause of generating the alternating currentof the third term, resulting in the generation of a cyclical noise asshown in FIG. 3.

If it is assumed that (1) intensities of the alignment light 4a and 4bprojected from two directions are almost the same; and that (2) there isexisted no asymmetry of diffracted light originating from the sectionalshape of alignment mark or from an inclined optical axis, i.e. g_(x),y=g_(x),-y in order to minimize this cyclical noise component shown inthe equation (7), the value represented by the equation (8) shoulddesirably be minimized. ##EQU3##

Namely, in order to minimize the value represented by the equation (8),it is required to sufficiently lower the reflectivity r_(m) of themembrane window 7 and to increase the diffraction efficiency g_(-l),l inthe direction of the detector. In particular, if the value of g_(-l),lis near to zero, the value of the equation (8) is diverged therebyincreasing noise rapidly. For this reason, it is important that thevalue of g_(-l),l is stable kept remained within a range remote fromzero, and should desirably be as large as possible.

According to this example, since a dyestuff-containing resist is coatedon an aluminum film formed on the substrate mark, it is possible toenlarge the difference between the intensity of partial-light 22reflected by the convex portion and passed through the resist film andthe intensity of partial-light 21 reflected by the concave portion outof the light diffracted from the substrate mark. Namely, by coating adyestuff-containing resist on the alignment mark, the increase incontrast of the substrate mark has been realized. Further, since thevariation of diffraction efficiency g_(-l),l due to the difference insectional shape of the mark can be more minimized as the value ofcontrast becomes closer to 1, with the value of g_(-l),l beingstabilized at a constant value which is remote from zero, it is possibleto decrease the alternating current component in the equation (7) and toobtain a measurement wavelength free from noise.

Since the diffraction efficiency depends mainly on the characteristic asa diffraction element of the alignment mark, it is difficult tosufficiently improve the diffraction efficiency even if an aligner isimproved. Accordingly, this example which is very effective in improvingthe diffraction efficiency is greatly useful in minimizing the noise inthe alignment signals.

An aluminum substrate provided with an alignment mark of increasedcontrast prepared as mentioned above was subjected to a measurement withrespect to the diffraction efficiency g_(-l),l in the direction ofdetector in relative to the height of the step of the alignment mark,the results being shown in FIG. 6. If the linear absorption coefficientwith respect to the alignment light onto the resist film 18 is assumedto be 2.7 μm⁻¹, the reflectance from the concave portion of thealignment mark is sufficiently minimized as compared with thereflectance from the convex portion as the height of the step becomeslarger as shown in FIG. 6. As a result, the contrast is increased andthe diffraction efficiency g_(-l),l is stabilized.

FIG. 7 illustrates a calculated result on the relationship between theheight of step and the diffraction efficiency when the linear absorptioncoefficient of the resist coated on an aluminum substrate is assumed tobe 0 μm⁻¹, i.e., when the contrast is assumed to be zero as acomparative example. As shown in FIG. 7, the diffraction efficiencychanges very much in accordance with the change in height of the step.For example, for every change in height by a distance of (0.15/n) μm ofthe step, the diffraction efficiency g_(-l),l changes from 0 to themaximum, and then from the maximum to 0. "n" in this case means arefractive index of the resist film 18 coated on the surface of thesubstrate. As indicated above, the diffraction efficiency becomes nearlyzero at a certain height of the step, and because of this, the accuracyof alignment signal at this height of the step is considered to havebeen deteriorated to a great extent.

As shown in FIG. 7, when the contrast is zero, the diffractionefficiency changes from 0 to the maximum as the height of the stepchanges at a distance of only about 0.1 μm, so that the diffractionefficiency in some of the substrate marks would be deteriorated unlessthe height of the step is controlled within the range of about ±0.05 μm.However, it is actually impossible to control the height of all marks onthe surface of a wafer within the range of about ±0.05 μm. Therefore, itis impossible to avoid the presence of a mark which is small indiffraction efficiency due to a slight difference in height of the mark.

It should be noted that, as shown in FIG. 6, the minimum value ofdiffraction efficiency according to this example does not become zero incontrast to the case where the linear absorption coefficient of theresist is assumed to be 0 μm⁻¹ (FIG. 7). In particular, when the height(h) of the step is larger than 0.6 μm, the variation of diffractionefficiency becomes small and therefore the value of the diffractionefficiency is stabilized. It can be seen from these results that thenon-uniformity of the diffraction efficiency of detecting light due tothe error in height of the step of the mark can be improved.

In the followings, the effects of this example will be explained withreference to a case where the cross-sectional shape of the substratemark indicating the identical position (for example, X) of a pluralityof different chips is not uniform. To be more specific, an example oflowering the non-uniformity in offset value by coating theabove-mentioned dyestuff-containing resist on the surface of thesubstrate having the marks formed non-uniform shape one another will beexplained.

The complex amplitude of light beam reached to a detector after analignment light projected from the plus direction in the XZ plane isdiffracted at the alignment mark of a substrate is defined as W₊₁. Onthe other hand, the complex amplitude of light beam diffracted after analignment light is projected from the minus direction in the same planeis defined as W₋₁. Then, these W₊₁ and W₋₁ can be represented by thefollowing equations (9) and (10).

    W.sub.+1 =B.sub.+1 exp {2πi(γ.sub.1 t+.sup.δ w/P)}Equation (9)

    W.sub.-1 =B.sub.-1 exp {2πi(γ.sub.2 t+.sup.δ w/P)}Equation (10)

wherein P is a pitch of mask grating; δ_(w) is the position of mark; δ₁and δ₂ are modulation frequency of couple of alignment light modulatedusing an acousticoptical modulator (AOM). B₊₁ and B₋₁ representrespectively a complex amplitude of light beam diffracted after analignment light is projected from the plus or minus direction, and canbe represented by the following equations (11) and (12).

    B.sub.+1 =b.sub.+1 exp(iβ.sub.+1)                     Equation (11)

    B.sub.-1 =b.sub.-1 exp(iβ.sub.-1)                     Equation (12)

wherein b₊₁ and b₋₁ represent respectively an amplitude of diffractedlight beam of an alignment light; and β₊₁ and β₋₁ represent respectivelya phase of diffracted light.

Therefore, the light intensity I_(w) diffracting in the direction of thedetector can be represented by the following equation (13). ##EQU4##

In the same manner, the light intensity I_(m) diffracting in thedirection of the detector from the minus side can be represented by thefollowing equation (14). ##EQU5##

In the actual measurement, the direction of diffracted light can bechanged by changing the pitch of the substrate mark and wafer mark inthe direction of Y, so that I_(w) and I_(m) can be measured using anindividual detector. The relative position between the substrate markand the mask mark can be measured from the difference in phase of thisintensity amplitude, i.e., [4π(δ_(w) -δ_(m))/P]+(β₊₁ -β₋₁)-(α₊₁ -α₋₁).The value of (β₊₁ -β₋₁)-(α₊₁ -α₋₁) corresponds to the offset value inthe measurement. The reason causing the offset value, i.e. the reasonthat β₊₁ is not equal β₋₁ and that α₊₁ is not equal α₋₁ is as follows.It is that the alignment marks do not have an idealized symmetricsectional shape.

(α₊₁ -α₋₁) is a term dependent on the cross-sectional shape of the maskmark. When a same mask is used, the term is constant. However, if thecross-sectional shape of the substrate mark differs from each other, thealignment accuracy would be deteriorated due to the reason explained asfollows. Namely, when a couple of laser beams 4a and 4b are projected, aphase difference (β₊₁ -β₋₁) is caused to generate between the diffractedlight from the incident light 4a and the diffracted light from theincident light 4b. The diffracted light from each incident light may besaid to be a contributing portion of the incident light at the detector6. When the substrate mark differs in its cross-section from each other,the phase difference also differs from one another depending on eachsubstrate mark, so that there would be non-uniformity in the relativeposition thus measured thereby giving rise to the deterioration ofalignment accuracy.

As one example of such a case, an alignment mark formed in a checkerwiselattice pattern and having a rectangular cross-section was selected, andthe phase difference Δβ (=β₊₁ -β₋₁) of diffracted light when the bottomof concave portion is inclined was calculated.

First, a resist of the conventional type was coated on a substrate markwhose concave portion has an inclined bottom. Then, the relationshipbetween the height (h) of step and the phase difference Δβ of diffractedlight was studied, the result being shown in FIG. 8. The conventionalresist used herein indicated no absorption to the alignment light. Theangle of inclined bottom of the concave portion was (0.1/2.25) in thedirection of X.

As shown in FIG. 8, when there was an inclination in the bottom of theconcave portion, the phase difference Δβ was changed in accordance withthe change in height of the step. Accordingly, if the height of the stepof the mark in the substrate was not uniform, the phase difference Δβ ateach substrate mark did not become zero, but indicated a different valuedepending on the height. Due to such changes in Δβ, the alignmentaccuracy was found deteriorated.

Additionally, the contrast of the substrate mark was caused to increase,and the relationship between the change in contrast and the phasedifference Δβ of diffracted light was studied, the result being shown inFIG. 9. In this case, the increase in contrast of the substrate mark waseffected by increasing the linear absorption coefficient of the resistto be coated on the mark.

The measurement was performed on seven different kinds of step differingin height from each other by a distance of 0.1 μm, the lowest heightbeing 0.4 μm and the highest height being 1.0 μm.

As shown in FIG. 9, when the contrast becomes closer to 1, the phasedifference Δβ also indicated a value closer to 0 in any examplediffering in height of step.

From the results shown in FIGS. 8 and 9, the followings can be saidabout the non-uniformity of the phase difference Δβ. Namely, in the casewhere a resist incapable of absorbing the alignment light is coated onthe substrate mark (FIG. 8), the minimum value of Δβ was -180 deg, andthe maximum value of Δβ was +180 deg among the samples of step rangingfrom 0.4 to 1.0 μm in height, thus indicating a large non-uniformity. Onthe other hand, since a resist capable of absorbing the alignment lightis coated on the aluminum substrate, the contrast of the alignment markis increased. The phase difference Δβ shown in FIG. 8 at each height(marked "X" in FIG. 8) is converged to zero as shown in FIG. 9. Forexample, when the height of step is 0.8 μm, the phase difference Δβindicates -80 deg at contrast 0.5. The value of Δβ at contrast 0.5 isless than half of that at contrast 0. Accordingly, a divergence of phasedifference Δβ is decreased to about half of that at contrast 0 for allheight of step. In particular, when the contrast of the substrate markwas adjusted to 0.95, the phase difference Δβ could be decreased toabout 1/10.

As explained above, it is possible to decrease the non-uniformity inphase difference of the detecting light originating due to thedifference in cross-sectional shape of the substrate mark by coating adyestuff-containing resist on the aluminum film formed on the mark. Inother words, it is possible to make constant the offset value throughoutwhole substrate marks, thereby improving the alignment accuracy.

Next, X-ray proximity lithography was performed on a substrate having analignment mark of this example formed thereon by using an alignmentsystem shown in FIG. 1. The substrate used herein was provided on itssurface with an alignment mark having a step about 0.95 μm in height,and with about 0.4 μm thick alloy layer consisting of aluminum andcopper deposited on the alignment mark. Additionally, aradiation-sensitive negative type resist containing 1.0% by weight ofanthraquinone-based organic dyestuff was coated on this metallic film.

For the purpose of comparison, a resist of the conventional type notcontaining a dyestuff was coated on the substrate having the samestructure of metallic film deposited thereon, and was subjected to X-rayproximity lithography by using the same alignment system as mentionedabove.

As a result, it was found that in the case of the substrate providedwith the alignment mark of this example which was coated with adyestuff-containing resist, the alignment accuracy was 25 nm (3σ). Thisdegree of accuracy is almost identical with the case where thisalignment system is applied to a substrate having relatively lowreflectance in for example LOCOS process or a gate process. Thesensitivity of the resist added with the dyestuff was deteriorated byabout 5% as compared with the conventional resist, but the deteriorationof resolution was not recognized at all. Specifically, it was confirmedthat a resolution of such high level as a fine pattern of 0.15 μm inline width could be formed.

By contrast, in the alignment exposure using the conventional resist notcontaining a dyestuff, the alignment accuracy was 260 nm (3σ). It willbe clear from these results that the non-uniformity of alignment (3σ)can be minimized by this example to about 1/10, and at the same time,alignment the accuracy can be improved by about 10 times.

In the following example, the manufacture of device through theapplication of this example to the X-ray proximity lithography forforming a metallic wiring will be explained in comparison with theconventional techniques.

When a metallic wiring is to be formed by using the conventionaltechniques, line density is at the same level as forming a wiring having0.4 μm line width. Therefore, it would be meaningless to provide theresist with a high resolution. Additionally, it is impossible in theconventional techniques to prepare a wiring of high reliability insingle step, and therefore the manufacture of a wiring has to beperformed through a plurality of manufacturing steps.

On the other hand, when this example is applied to the manufacture ofwiring, it is possible to form a fine pattern of 0.15 μm in line width,and non-uniformity in alignment can be inhibited to very small value.Moreover, it is possible to prepare a wiring of high reliability insingle step. As a result, it is possible to miniaturize the cell ofdevice by at least 10% as compared with the conventional cell, and atthe same time, to reduce the number of the manufacturing steps in themanufacture of wiring.

In the example mentioned above, HeNe laser beam was used as an alignmentlight, and a resist containing an anthraquinone-based organic dyestuffhaving an absorption wavelength at the vicinity of 633 nm which is thewavelength of HeNe laser was coated on a metallic film. However, thisinvention is not limited to these alignment light and resist. Any kindof resist or dyestuff-containing resist can be used depending on thekind of alignment light to be irradiated, as far as the resist has anabsorption wavelength which is nearly identical with the wavelength ofthe alignment light to be employed. Conversely, an alignment light maybe subsequently selected depending on the kind of resist to be used.

For example, if a resist for i-line which was colored in red is to beused, HeCd laser beam to be absorbed by red can be used wherebyachieving the effects of this invention.

Specifically, the combinations of alignment light source and resist asshown in Table 1 can be employed.

                  TABLE 1                                                         ______________________________________                                        Alignment                                                                     light                     Dyestuff to be                                      source       Resist       added (Conc.)                                       ______________________________________                                        HeNe laser   Radiation-sensitive                                                                        Anthraquinone-                                      (0 = 633 nm) resist       based dyestuff                                                                (1.0 wt %)                                          HeCd laser   Resist for i-line                                                                          --                                                  (0 = 442 nm)                                                                  Ar laser     Radiation-sensitive                                                                        Disazo-based                                        (0 = 514.5 nm)                                                                             resist       dyestuff                                                                      (1.0 wt %)                                          ______________________________________                                    

Furthermore, the following compounds represented by the formulas (III)and (IV) were used as an example of anthraquinone-based dyestuff anddisazo-based dyestuff respectively for forming a pattern in the samemanner as mentioned above, and the results were studied. These dyestuffswere incorporated into the resist at the amount of 1.0% by weight, andthe resultant resists were coated over the mark thereby forming thealignment mark of this example. Then, on this alignment mark, theexposure was performed using X-rays. ##STR5##

As a result, in the example where anthraquinone-based dyestuff is addedto a resist, it was possible to form a fine pattern as fine as 0.15 μmin line width, though the lowering in sensitivity of 5% or less wasrecognized. Whereas, in the example where disazo-based dyestuff is addedto a resist, it was possible to form a fine pattern as fine as 0.15 μmin line width, though the lowering in sensitivity of 10% or less wasrecognized.

Table 2 shows the wavelength of each alignment light, the reflectance ofaluminum to these wavelength, and the linear absorption coefficient ofthe resists.

                  TABLE 2                                                         ______________________________________                                        Alignment                 Linear                                              light          Reflectance                                                                              absorption                                          source         of Al substrate                                                                          coefficient                                         ______________________________________                                        HeNe laser     91%        0.7 μm.sup.-1                                    (0 = 633 nm)                                                                  HeCd laser     92%        0.8 μm.sup.-1                                    (0 = 442 nm)                                                                  Ar laser       92%        1.2 μm.sup.-1                                    (0 = 514.5 nm)                                                                ______________________________________                                    

As shown in Table 2, since each resist exhibits a large absorbency tothe alignment light, it is possible to increase the reflectance ratiobetween the convex portion and concave portion by coating the resistsover the step of the mark having an aluminum layer deposited thereon.For example, in the case of alignment mark having a step 0.5 μm inheight, the reflectance ratio was 2 or more for every samples. Althoughthere may be a slight difference depending on the kind of alignmentsystem, the alignment accuracy is considered to be increased by 50% ormore.

The method of forming a light absorption layer on the alignment mark ofthis invention will be explained with reference to (Example I-2) to(Example I-6) as follows.

Example I-2

An alignment mark deposited with a light absorption layer consisting ofa dyestuff-containing resist will be explained with reference to FIGS.10A and 10B.

A light absorption material 27 can be buried in the concave portion ofthe substrate mark in accordance with the following steps.

First, as shown in FIG. 10A, an alignment light absorption material 27is coated, through spin coating, on the surface of a substrate 25provided with a substrate mark 26 consisting of silicon oxide and withan aluminum film deposited on the substrate mark 26. This lightabsorption material 27 is formed of a material which can be removed byetching method. This light absorption material may be coated in anydesired thickness as long as the convex portion of the substrate markcan be covered with it. However, taking the subsequent step for removingthe light absorption material into consideration, the thickness of thelight absorption material layer should desirably be 0.5 μm or less.

Then, the light absorption material is removed by means of an etchingtreatment using oxygen plasma etching or a grinding treatment until thesurface of the convex portion of the alignment mark is exposed as shownin FIG. 10B. By the way, there is no need to completely remove thelight-absorbing material from the upper surface of the convex portion ofmark in this etching treatment or grinding treatment, but part of thelight-absorbing material may be left thereon, provided it is capable ofdetecting a signal intensity from the convex portion.

In the case where the substrate mark is consisted of a low step having aheight of 0.3 μm or less, since 5 the contrast of the mark can beimproved by burying the light-absorbing material 27 only in the concaveportion of the substrate mark 26, the detection of the alignment signalcan be easily performed. Moreover, it is possible to achieve thedetection of signal and to improve the alignment accuracy according tothis example even in such a case where the height of the step of thealignment mark is so low that the prior art has been so far failed todetect an alignment signal therefrom.

Example I-3

In this example, a material whose absorption coefficient to an alignmentlight of irradiation region can be reduced by the irradiation ofspecific UV-rays is employed as a light absorption material. Thismaterial may be suitably selected according to the wavelength of theultraviolet.

Referring to FIG. 11A, an alignment light absorption material 30 iscoated, through spin coating, on the surface of a substrate 31. Thepenetrating depth of the specific UV rays to this alignment lightabsorption material 30 is about 0.5 μm. The alignment light absorptionmaterial 30 is coated in such a manner that the thickness over theconvex portion of the mark is about 0.5 μm and the resultant coatedsurface thereof is flat.

This alignment light absorption material layer formed on the substratemark is then subjected to a clarifying treatment by irradiating aspecific ultraviolet rays 32 thereon so as to clarifying the upperportion of the layer as shown in FIG. 11B, i.e., a thickness of whichbeing almost the same as that lying over the convex portion. With thistreatment, it is possible to improve the alignment signal intensitywhile increasing the contrast of the substrate mark.

With this example, it is possible to obtain the same effects as in theprevious example. Further, this example is advantageous in that thealignment signal intensity can be controlled by changing the intensityor irradiating time of the ultraviolet rays to be irradiated.

Example I-4

In this example, a material which can be softened at a specifictemperature is employed as a light absorption material. For example,carbon resin can be used as such a light absorption material.

An alignment mark deposited with a softening light absorption materialand manufacturing method thereof will be explained with reference toFIGS. 12A and 12B.

Referring to FIG. 12A, an alignment light absorption material 34 isdeposited all over the substrate mark comprising a concave portion and aconvex portion thereby forming a layer having half a thickness ofconcave or convex portion. Then, the light absorption material issubjected to heat treatment at a temperature higher than the softeningtemperature of the light absorption material, thereby softening andallowing the light absorption material to flow into the concave portion35. As a result, the concave portion 35 is buried with the lightabsorption material as shown in FIG. 12B.

When the contrast of the substrate mark is increased in this manner, theS/N ratio is also increased thereby obtaining almost the same effects asin the previous examples.

Example I-5

It is also possible to deposit a to-be-etched film consisting of aspecific material as an etching-adjusting material on the lightabsorption material after the deposition of the light absorptionmaterial on the concave portion and the convex portion of the substratemark and before the removal of this light absorption material. Anymaterial may be employed as this etching-adjusting material as long asthe material has almost the same etching rate as that of lightabsorption material.

The method of manufacturing this structure will be explained withreference to FIGS. 13A to 13C.

First, an alignment light absorption material such as a carbon film 38is deposited on the concave and convex portions of the alignment markregion by means of sputtering as shown in FIG. 13A. Then, anetching-adjusting material such as silicon oxide film 39 is deposited onthe alignment light absorption material layer as shown in FIG. 13Bthereby forming a layer of flat surface having a sufficient filmthickness.

Subsequently, the surface of substrate mark is subjected to an etchingtreatment such as RIE (Reactive Ion Etching) thereby removing thealignment light absorption material together with the etching-adjustingmaterial until a sufficient signal intensity can be obtained, therebyobtaining a structure as shown in FIG. 13C. In this etching treatment,there is no need to control the etching treatment in a manner that thesurface of the light absorption material layer deposited on the concaveportion of the mark becomes in flush with the surface of the convexportion of the mark. For example, part of the light absorption materiallayer may be left on the surface of the convex portion of the mark, orthe surface of the light absorption material layer becomes lower thanthe surface of the convex portion of the mark. It is also possible toemploy a grinding treatment in place of the etching, thereby removingthe etching-adjusting material and the light absorption material.

In this example, a flat layer of alignment light absorption material 38is formed on the concave portion 37 of the substrate mark therebyobtaining a sufficiently high S/N ratio. According to this method, it ispossible to fill a light absorption material which is usually verydifficult to flatly deposit so that the choice of useful lightabsorption material would be enlarged. According to this example, it ispossible to expect the same effects as in the previous examples.

Moreover, it is possible to use a material which is inherently incapableof absorbing an alignment light for forming a light absorption layer.Namely, a material incapable of absorbing an alignment light is flatlycoated on an alignment mark thereby forming a film on which anopacifying treatment is performed. Specifically, an organic materialsuch as an ordinary resist material is coated on a high-reflectivesubstrate, and then subjected to a hard baking treatment therebyopacifying the organic material coated on the substrate.

In the above examples, X-rays proximity lithography is explained as anexposure means. However, this invention is not limited to this, butevery kinds of light exposure technique utilizing an optical system suchas an electron beam or an ion beam can be applicable.

In Example I-1, the effect of this invention is explained with referenceto a system wherein the detection of position is performed through thephase signal of alignment light. However, this invention is not limitedto this system, but other kind of system wherein the detection ofposition is performed through light intensity signals can be utilizedfor improving the S/N ratio of an alignment signal.

One example of such a system will be explained with reference to FIGS.14A and 14B.

In a system wherein the detection of position is performed through lightintensity signals, an alignment light is first projected onto analignment mark, and the resultant regular reflection light intensityfrom the alignment mark is measured by means of a line sensor or an areasensor. Then, a reflection intensity profile about the alignment mark asa whole is obtained from the measured signals, and a wave shapecorresponding to the step is detected thereby calculating the positionof the step.

Specifically, a resist capable of absorbing an alignment light asexplained in Example I-1 is coated on a substrate deposited with ametallic film thereby forming an alignment mark, on which the alignmentlight is irradiated to measure a reflection intensity.

The reflection intensity profile thus obtained is shown together withthe cross-sectional view of the alignment mark in FIG. 14A. On the uppersurface of the alignment mark 42 having an aluminum film depositedthereon is disposed a flat layer of a light absorption material 43 asshown in FIG. 14A. When the light absorption material 43 is disposed atleast on the concave portion of the alignment mark 42 in this manner, itis possible to minimize the noise as shown in the graph of FIG. 14A.Moreover, since the intensity ratio between the reflection light fromthe convex portion and the reflection light from the concave portion ofthe substrate mark can be increased, the position of the step can beeasily detected.

The reflection intensity profile obtained from the conventionalsubstrate mark having a metallic film made of aluminum for example onits surface is shown together with the cross-sectional view of thealignment mark in FIG. 14B. when a light absorption material is notdisposed on its surface as shown in FIG. 14B, a reflection intensityprofile of only poor S/N ratio would be obtained due to the influence ofthe surface ruggedness of the metallic film. Moreover, it is difficultto detect the position of the step of the mark because of the highreflectance of the metallic film formed on the surface of the substrate.

As explained above, it is possible even with a system where thedetection of position is performed through a light intensity signals toremarkably improve the alignment accuracy by disposing an alignmentlight absorption material on the surface of the mark.

Example I-6

This example relates to a method for carrying out an alignment using anextreme ultraviolet rays as an exposure light, and an alignment mark andmanufacturing method to be used for improving the alignment accuracywill be explained.

A material to be incorporated into a resist for obtaining a lightabsorption material is required to have the following characteristics inaddition to the characteristic of absorbing an alignment light. Namely,the material is low in absorption coefficient to the exposure light forphotosensitizing a resist, and hardly gives a bad influence to thephotosensitive property of the resist.

When g-line or i-line is used as an exposure light, i.e., a resist forg-line or i-line is used as a light absorption material, a differencebetween the wavelength of alignment light and the wavelength of exposurelight can be enlarged by setting the wavelength region of the alignmentlight to a visible region. Therefore, it is possible to easily select amaterial which is capable of absorbing only an alignment light.Accordingly, by the addition of a material capable of absorbingalignment light into a resist for g-line or i-line, it is possible toobtain a light absorption material. Further, since the absorption toX-rays of most materials is close to zero, the kind of materials usefulfor adding into a resist for forming a light absorption material is moreextensive in the case of a radiation-sensitive resist for X-rays ascompared with the resists for g-line or i-line.

Depending on the kind of wavelength of exposure light, the addition of adyestuff into a resist may give a bad influence in a degree to theresolution of pattern. In such a case, it may be generally advantageousto partially deposit a light absorption material on the surface of theconcave or convex portion of the alignment mark so as to increase thecontrast of the alignment-detecting light.

In this example, a thin layer capable of absorbing the alignment lightis partially formed on the surface of the concave or convex portion ofthe alignment mark by using a converging light or a converging chargedparticle beam so as to increase the contrast of the alignment mark.

Carbon film may be formed as such a thin film mentioned above.

Example I-6-a

This example explains a process of forming a carbon film on the concaveportion of the alignment mark region having aluminum film formed on thesurface thereof by using FIB (Focused Ion Beam) apparatus.

FIG. 15 illustrates a schematic view of the FIB apparatus. As shown inFIG. 15, according to this apparatus, styrene gas is introduced vianozzle 52 into a sample chamber 57. On the other hand, an ion beam froma gallium ion gun 51, which has been accelerated to 30 kV is convergedon a sample 53. Since the sample 53 is mounted on an X-Y stage, theconverged ion beam can be irradiated to any desired position of thesurface of the sample. When this apparatus is used, the carbon atom ofstyrene is dislocated by the energy of the accelerated ion beam therebyallowing a carbon film to be formed on any desired position of thesample 53.

As a sample, a high-reflective underlying substrate provided with asilicon oxide alignment mark and having an aluminum film formed on thealignment mark is used. On this mark region is formed a carbon film bythe method mentioned above thereby obtaining an alignment mark of thisexample.

The detecting light intensity profile of the alignment mark thusobtained is shown together with the cross-sectional view of thealignment mark having the carbon film formed thereon in FIG. 16A.

As shown in FIG. 16A, the concave portion of the alignment mark isdeposited with the carbon film 61 so that the detecting light intensityof this concave portion is extremely lowered. Therefore, it is possibleto accurately detect the position of step of the mark.

The detecting light intensity profile obtained from the conventionalalignment mark is shown together with the cross-sectional view of thismark region in FIG. 16B. As shown in FIG. 16B, in the case of theconventional alignment mark, the noise in the detecting signals is largedue to the influence of the surface ruggedness of the covering aluminumfilm. Moreover, it is difficult to detect the position of the step ofthe mark because of the high reflectance of the aluminum film.

Since the carbon film is formed only in the region of the alignmentmark, the device region would not be affected by the process of formingthe carbon film.

Example I-6-b

This example explains a process of forming a carbon film at apredetermined angle on the alignment mark region having aluminum filmformed thereon by using a mask plate having an opening thus exposing thealignment region and using IBS (Ion Beam Sputter) apparatus.

FIG. 17 illustrates a schematic view of the IBS apparatus. As shown inFIG. 17, according to this apparatus, argon gas is ionized by means ofan electromagnet 79 and a microwave injected in ECR ion gun 71 frommicrowave generator 72. Argon ion thus obtained is accelerated toward aparallel accelerating plate 81 thereby impinging the argon ion upon acarbon target 75 inclined at an angle of 45 degrees so as to sputtercarbon atoms or molecules toward the sample 76 mounted at apredetermined angle. On the other hand, since the sample 76 is attachedwith a mask plate having an opening formed only at a portioncorresponding to the alignment mark region, the carbon film is formedonly on the predetermined region of the mark. When this apparatus isused, the carbon atom of styrene is dislocated by the energy of theaccelerated ion beam thereby allowing a carbon film to be formed on anydesired position of the sample 53.

As a sample, a high-reflective underlying substrate provided with asilicon oxide alignment mark and having an aluminum film formed on thealignment mark is used. On this mark region is formed a carbon film bythe method mentioned above thereby obtaining an alignment mark of thisexample.

The detecting light intensity profile of the alignment mark thusobtained is shown together with the cross-sectional view of thealignment mark having the carbon film formed thereon in FIG. 18A.

As shown in FIG. 18A, on the right side of the convex portion of thealignment mark is deposited with the carbon film 61 so that the step onthe left side of the convex portion is made more conspicuous. Therefore,it is possible to accurately detect the position of step of the mark.

Although the carbon film is formed from the right side of the convexportion of the mark as shown in FIG. 18A, this invention is not limitedto this embodiment, but it is also possible to form the carbon film fromany side.

The detecting light intensity profile obtained from the conventionalalignment mark is shown together with the cross-sectional view of thismark region in FIG. 18B. As shown in FIG. 18B, in the case of theconventional alignment mark, the noise in the detecting signals is largedue to the influence of the surface ruggedness of the covering aluminumfilm. Moreover, it is difficult to detect the position of the step ofthe mark because of the high reflectance of the aluminum film.

Since the carbon film is formed only in the region of the alignment markas in the previous example, the device region would not be affected bythe process of forming the carbon film.

According to this example, it is possible to increase the contrast ofthe alignment mark without leaving a light absorption material in thedevice region, even if it is difficult to add a material capable ofabsorbing an alignment light to a resist. Specifically, according tothis example, the alignment accuracy over the metallic film can beimproved when the metallic wiring is formed according to the followingsteps. Namely, first resist for extreme ultraviolet rays is coated overa metallic film thereby forming a resist film. Then, a predeterminedpattern is transferred onto this resist through the use of a mask, andthe resultant resist pattern is used as an etching mask to etch themetallic film thereby forming a metallic wiring. As a result, it ispossible to accurately form a wiring with a fine line width, andtherefore to increase the integration of semiconductor device by 10% ormore.

Example II

Example II describes an example of improving the accuracy of detectingthe alignment mark formed on an underlying substrate of low reflectance.

Example II-1

An example of disposing a high-reflective material on the concaveportion of alignment mark region in the heterodyne alignment systemapplied in the X-ray proximity lithography is explained herein indetail.

The alignment system used herein is the same as that used in ExampleI-1. Referring to FIG. 1, HeNe laser beams 3 and 4 are irradiated to amask mark 1 and a wafer mark 2 in the XZ plane and at an equi-incidentangle. These HeNe laser beams 3 and 4 used are modulated in advance to79.9 MHz and 80.0 MHz respectively by means of acousticoptical modulator(AOM). Each of the incident light 3 and 4 can be diffracted in anydirection in accordance with the theory of diffraction. However, in thisexample, a phase difference between a detecting light 5 diffracted atthe mask mark 1 in the particular direction in YZ plane and a detectinglight 6 diffracted at the substrate mark 2 in the particular directionin YZ plane is measured, and based on this measurement, the alignmentbetween the mask and the substrate is performed.

Accordingly, in order to increase the detecting signal intensity in anunderlying substrate having a low reflectance, it is required to enhancethe diffraction efficiency in the direction of the detector. Thediffraction efficiency can be improved by increasing the reflectance ofany one of the concave and convex portions of the checkered waferalignment mark 2. By the way, the larger the reflectance ratio betweenthe concave and convex portions of the mark is, the higher diffractionefficiency can be obtained.

According to this example, it is possible to improve the diffractionefficiency by filling the concave portion of the alignment mark regionon the substrate with a high-reflective material so as to increase thereflectance of the concave portion.

Specifically, as shown in FIG. 19A, an aluminum film 93 as ahigh-reflective material was deposited on the silicon substrate 92having alignment marks 91 (height: 0.2 μm) made of silicon oxide. Thethickness of the aluminum film 93 was about 0.3 μm which was formed bymeans of DC sputtering.

Then, a resist as an etching-adjusting material was coated through aspin coating method on the surface of the aluminum film 93 therebyforming a resist film 94 as shown in FIG. 19B. The resist employedherein was a material which exhibits almost the same etching rate in RIEusing a chlorine-based gas as that of aluminum.

Subsequently, an etching using a chlorine-based gas 95 was performedthereby exposing the surface of the convex portion of the alignment mark92. As a result, the concave portion of the alignment mark 92 was filledwith aluminum film 93 as shown in FIG. 19C.

Consequently, the reflectance ratio between the concave and convexportions of the mark was increased to about 10 from the value of 1.3which was obtained with a sample wherein the concave portion was notfilled with aluminum film, and at the same time, the S/N ratio was alsoimproved from 1.5 to about 7.

Example II-2

This example explains an application of an alignment system using animage processing. According to this system, a reflected light ofalignment light irradiated onto the alignment mark region on a substrateis observed with an area sensor, and the alignment is performed throughthe image processing.

Specifically, according to this system, the minimum value in reflectionintensity which corresponds to the position of the step is detected froma reflection intensity profile of alignment mark observed with an areasensor thereby performing the alignment. When the reflectance is small,the reflectance of the background is also small, so that S/N ratio ofthe intensity profile of alignment signal is also small thusdeteriorating the alignment accuracy.

According to this example, it was possible to improve the alignmentaccuracy by filling the concave portion of the substrate mark with ahigh-reflective material.

Specifically, as shown in FIG. 20A, an aluminum film 93 as ahigh-reflective material was deposited on the silicon substrate 91having alignment marks 92 (height: 0.4 μm) made of silicon oxide. Thethickness of the aluminum film 93 was about 0.2 μm which was formed bymeans of DC sputtering.

Then, the resultant composite body was subjected to heat treatment at atemperature (about 500° C.) slightly higher than the softening point ofaluminum thereby softening the aluminum. As a result, the softenedaluminum disposed on the surface of the convex portion was allowed flowinto the concave portion, and subsequently re-solidified to obtain alayer of flat surface. With this treatment, an underlying substratehaving aluminum filled in the concave portion of the alignment mark wasobtained as shown in FIG. 20B.

The reflection intensity profile of the underlying substrate, which wasdetected by a line sensor is shown in FIG. 21A. As shown in FIG. 21A,the concave portion of the alignment mark was filled with ahigh-reflective material so as to increase the reflectance ratio betweenthe concave portion and the convex portion. As a result, it has becomepossible to easily detect the position of step of the mark.

The reflection intensity profile of the conventional underlyingsubstrate is shown in FIG. 21B. It will be seen that the minimum valueindicating the position of the step is buried within the noise thusmaking it unclear in the case of a low reflectance substrate. Whencompared with the profile shown in FIG. 21B, the reflectance ratio ofthis example is about 10 times as high as that of this conventionalproduct. It will be seen from this result that the alignment accuracycan be greatly improved by filling the concave portion of alignment markwith a high-reflective material.

This example may be applied to an alignment system where a diffractedlight from an alignment mark is utilized, thus obtaining almost the sameresults as in the Example II-1.

Example II-3

This example explains a method of manufacturing an underlying substrate,which comprises a combination of a heating treatment and a grindingtreatment.

Specifically, as shown in FIG. 22A, a carbon film 96 functioning as astopper was deposited on the silicon substrate 91 having alignment marks92 (height: 0.4 μm) made of silicon oxide. The thickness of the carbonfilm 96 was about 0.01 μm which was formed by means of RF sputtering.Then, aluminum acting as a light reflective material was depositedthrough CD sputtering to a thickness of about 0.5 μm, which was slightlythicker than that of the step as shown in FIG. 22B.

Then, the resultant composite body was subjected to heat treatment at atemperature (about 500° C.) slightly higher than the softening point ofaluminum thereby softening the aluminum. As a result, the softenedaluminum disposed on the surface of the convex portion was allowed flowinto the concave portion, and subsequently re-solidified to obtain alayer of flat surface as shown in FIG. 22C.

Further, as shown in FIG. 22D, colloidal silica 97 (particle diameter:0.03 μm to 0.1 μm) was used as an abrasive to grinding the surface ofthe aluminum film 93. Finally, the substrate was subjected to an etchingtreatment using oxygen plasma 98 thereby removing the carbon film 96remaining on the surface of the convex portion of the alignment mark 92.

Through processing of the underlying substrate according to the abovesteps, it was possible to improve the flatness of the surface ofaluminum film as compared with Example II-2. Additionally, it waspossible to completely remove the aluminum remaining on the convexportion of the alignment mark. Therefore, the noise of alignment signaldue to the surface ruggedness of the aluminum film or due to thealuminum remaining on the convex portion can be decreased as comparedwith the method of Example II-2. Further, the S/N ratio of alignmentsignal of this example was found to be about 1.5 times as high as thatof Example II-2.

Example II-4

This example explains a case where a high-reflective material isdeposited on the convex portion of the alignment mark.

Specifically, as shown in FIG. 23A, a resist film 99 was depositedthrough a spin coating method on the silicon substrate 91 havingalignment marks 92 (height: 0.4 μm) made of silicon oxide. The thicknessof the resist film 99 thus formed on the surface of the convex portionwas about 0.3 μm.

Then, the resist film formed on the convex portion of the alignment mark92 was completely removed by an etching treatment using an oxygen plasma98, leaving the resist film 99 only on the concave portion as shown inFIG. 23B. The thickness of the resist film 99 thus left on the concaveportion was about 0.2 μm. Therefore, there were still a difference of0.2 μm in height between the surface of the resist film 99 and theconvex portion. Further, this resist film exhibited a sufficientselective ratio in the above etching treatment in distinction fromsilicon or silicon oxide constituting the underlying substrate so thatthe underlying structures constituted by these materials were notaffected by the etching treatment.

Subsequently, an aluminum film 93 having a uniform thickness of about0.2 μm was formed on all of the concave and convex portions of thealignment mark 92 by way of DC sputtering as shown in FIG. 23C.

Finally, the resist film 99 left on the concave portion of the alignmentmark 92 was dissolved using an organic solvent, thereby removing thealuminum film 93 deposited on the resist film 99, thus leaving thealuminum film deposited only on the convex portion of the alignment markas shown in FIG. 23D.

Consequently, the reflectance ratio between the concave and convexportions of the mark was increased to about 10 from the value of 1.3which was obtained with a sample wherein the convex portion was notdeposited with aluminum film, and at the same time, the S/N ratio wasalso improved from 1.5 to about 7.

According to this example, the surface of the convex portion of thealignment mark is covered with a flat aluminum film, so that not onlythe signal intensity from the convex portion can be magnified, but also,if the shape of the convex portion is relatively deformed or collapsedas whole, the noise of alignment signal due to the collapsed shape ofthe convex portion can be minimized.

Example II-5

This example explains a case where a high-reflective material isdeposited on all of the concave and convex portions of the alignmentmark.

Specifically, as shown in FIG. 24A, an aluminum film 93 was depositedthrough a DC sputtering method on the silicon substrate 91 havingalignment marks 92 (height: 0.4 μm) made of silicon oxide. The thicknessof the aluminum film 93 was about 0.1 μm throughout the concave andconvex portions of the alignment mark, thereby enhancing the reflectioncoefficient of the alignment mark region as a whole.

Then, a resist film 99 containing a predetermined dyestuff was depositedthrough a spin coating method on the aluminum film 93 as shown in FIG.24B. As the dyestuff mentioned above, about 1.0% by weight of ananthraquinone-based compound exhibiting a large absorption to thealignment light was incorporated into the resist.

Since HeNe laser (wavelength: 633 nm) was used as a light source in thealignment, the above anthraquinone-based compound was used as a dyestuffcapable of absorbing a red light of this wavelength. There is nopossibility of deteriorating the features of the resist such assensitivity or resolution by the addition of this anthraquinone-basedcompound into the resist. The concentration of the dyestuff in theresist was controlled such that the ratio of (reflection intensity fromthe concave portion)/(reflection intensity from the convex portion) onthe mark becomes about 0.8.

The structure shown in this example is intended as in the case ofExample II-4 to improve the S/N ratio of the alignment signal byincreasing the reflection coefficient from the convex portion of thealignment mark rather than the reflection coefficient from the concaveportion. Since both of the convex and concave portions of the mark arecovered with aluminum film in this example, the generation of noiseoriginating from the collapsing in shape of the convex portion as wellas the concave portion, if any, can be minimized.

As mentioned above, HeNe laser (wavelength: 633 nm) was used as a lightsource in the alignment, and for the purpose of enabling the resist toabsorb this laser light, an anthraquinone-based compound was used as adyestuff for the resist in this example.

However, this invention is not limited to this combination. For example,if a resist which is inherently capable of absorbing light of a specificwavelength is employed as a coating material on a light reflectivelayer, any suitable alignment light may be selected so as to match withthis specific wavelength, thereby obtaining substantially the sameeffects as the C above combination. For example, if a red colored resistfor i-line is selected, a light source such as HeCd laser may be used.

In the above description of this invention, examples of improving thedetecting accuracy of alignment mark on a high reflectance substrate aswell as on a low reflectance substrate are explained.

However, this invention is also applicable to an alignment exposure forforming a metallic wiring wherein an alignment accuracy may more likelybe deteriorated among a plurality of aligning processes in themanufacture of a semiconductor device.

To be more specific, for the purpose of forming a metallic wiring, asilicon oxide film is first formed on a wafer, and then, a prescribedregion of the silicon oxide film is deleted. Subsequently, a metallicfilm such as aluminum film is deposited all over the wafer by way ofmagnetron sputtering. After depositing a resist film on the metallicfilm, an alignment exposure is conducted via a mask having apredetermined pattern formed therein, thereby transferring the patternof the mask. After finishing the development of the pattern, themetallic film is etched, using the patterned resist as an etching mask,by means of ECR etching thereby forming the metallic wiring. Therefore,in the formation of a metallic wiring, an alignment exposure on ametallic film (which is poor in alignment accuracy) is indispensable.For the purpose of forming a metallic wiring of high reliability evenwith such a low alignment accuracy, it is required according to theconventional technique to perform the patterning under the conditions inwhich the resolution inherent to a resist is deliberately dropped.Further, according to the conventional technique, it is difficult toform a wiring of desired line width in a single step, so that aplurality of similar steps have to be repeated.

Consequently, the miniaturization of semiconductor device is highlydependent not only on the improvement of resolution of a resist, butalso on the alignment accuracy in the occasion of performing thealignment of a mask for forming a metallic wiring.

One of the object of this invention is to provide a method for improvingan alignment mark of poor alignment accuracy in order to make the mostof the capacity of an alignment system which has been conventionallymounted on an alignment exposure apparatus. It has been made possibleaccording to the alignment exposure system of this invention to improvethe alignment accuracy in the formation of metallic wiring to the samelevel as obtainable in the alignment exposure using other kinds ofsubstrate. Consequently, it has become possible to perform the alignmentexposure even in the formation of metallic wiring under the conditionsin which the critical (maximum) resolution obtainable by the selectionsof exposing method and resist could be made the most of. Moreover, sincea metallic wiring of high reliability can be obtained by a single step,the manufacturing process can be simplified, thus reducing the number ofmanufacturing step.

As explained above, the improvement of alignment accuracy in theformation of metallic wiring makes it possible to miniaturize asemiconductor device. Specifically, due to the improvement of thealignment accuracy in the formation of metallic wiring to the same levelas obtainable in the alignment exposure using other kinds of substrate,it has become possible to miniaturize a semiconductor device such asDRAM by about 10%. This means that the design rule (minimum line width)to be required can be loosened to a large extent, the line width can becontrolled more easily, and a reliability of the wiring is increased, sothat a yield can be increased remarkably.

As explained above, it is possible according to this invention toperform a high accuracy alignment exposure even on a high-reflectivesubstrate which is inherently poor in alignment accuracy, and tomanufacture a semiconductor device of high integration improved by 5% ormore as compared with the conventional semiconductor device.

Further, it is possible according to this invention to remarkablyimprove the alignment accuracy even on a low-reflective substrate whichis inherently poor in alignment accuracy. It is also possible accordingto this invention to improve a measurement accuracy even when thisinvention is applied to a system for evaluating an alignment byobserving a pattern obtained from the alignment.

The alignment mark according to this invention is useful in an alignmentexposure technique such fine workings in the manufacture of asemiconductor device, and would be greatly valuable in industries.

Additional advantages and modifications will readily occur to thoseskilled in the art. Therefore, the invention in its broader aspects isnot limited to the specific details, representative devices, andillustrated examples shown and described herein. Accordingly, variousmodifications may be made without departing from the spirit or scope ofthe general inventive concept as defined by the appended claims andtheir equivalents.

What is claimed is:
 1. An alignment mark illuminated by radiation froman alignment radiation source for aligning a substrate having a lowreflectance with a mask during manufacture of a semiconductor device,said alignment mark comprising:at least one step directly formed on asurface of said substrate and having a substrate surface portion and anoutward projecting nonreflecting convex portion; and a reflectivemetallic film directly formed on the outward projecting nonreflectingconvex portion to from at least one reflective portion, wherein a sideof the reflective portion is substantially aligned with a side of theoutward projecting nonreflecting convex portion.
 2. An alignment markilluminated by radiation from an alignment radiation source for aligninga substrate having a low reflectance with a mask during manufacture of asemiconductor device, said alignment mark comprising:at least one stepdirectly formed on a surface of said substrate and having a substratesurface portion and an outward projecting nonreflecting convex portion;and a reflective metal film directly formed on the substrate surfaceportion and filling a space between two adjacent outward projectingnonreflecting convex portions to form at least one reflective portion,wherein a level of an upper surface of the reflective portion issubstantially the same as that of an upper surface of the outwardprojecting nonreflecting convex portion.
 3. An alignment markilluminated by radiation from an alignment radiation source for aligninga substrate having a low reflectance with a mask during manufacture of asemiconductor device, said alignment mark comprising:at least one stepdirectly formed on a surface of said substrate and having a substratesurface portion and an outward projecting nonreflecting convex portion;and a reflective metallic film and a stopper film interposed at leastbetween the reflective metallic film and the substrate surface portion,the reflective metallic film and the stopper film filling a spacebetween two adjacent outward projecting nonreflecting convex portions toform at least one reflective portion, wherein a level of an uppersurface of the reflective portion is substantially the same as that ofan upper surface of the outward projecting nonreflecting convex portion.